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Cleanroom

The Nanofab is a shared facility house equipment for creation and charachterization of structures down to nanometer lengthscales. The Nanofab is located at Arnimalle 14 in rooms -1.2.12 (cleanroom with e-beam lithography system, thermal evaporator, AFM, microscopes) and -1.1.17 (chemical processing, spinners, etchers, critical point drying). Future planned additions include optical lithography, electron beam evaporator, FIB and a glovebox cluster.  The facility is managed by Kirill Bolotin and Sigfried Eigler.

Existing Users:

General cleanroom rules. Follow them!

  • Gowning. To enter the cleanroom, you must wear a 1) white gown, 2) plastic shoes, 3) headcover and beardcover (if applicable), and 4) gloves. Here are the instruction for procuring gown/shoes.
  • Journaling. Please make sure to record every use and every problem that arose during the use of cleanroom instruments in the log book of that instrument. If anything broke or did not work properly -- please make a note in the logbook and notify the tool superuser.
  • Cleaning. The cleanroom must be clean! To achive this lofty goal, all active users must participate in its cleaning. Please refer to the schedule and the description of the cleaning duties.

Equipment. (Do not use any equipment if you have not been trained by one of the superusers!)

Equipment scheduling (Please only book necessary time. Delete unused slots. If you do not appeat within 15min from the reservation -- your slot is for grabs!)

New users: 

If you would like to get cleanroom access, you must first get familiar with general cleanroom procedures and safety rules. To access the cleanroom please email Kirill Bolotin or Siegfried Eigler.