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Equipment and techniques


To fabricate nanoscale devices, we operate a cleanroom facility at FU Berlin (-1.2.12 Arnimalle 14). It currently includes the following tools:

  • Electron beam lithography system (Raith Pioneer 2)
  • Metal evaporator (KJLC Nano 36)
  • Chemical vapor deposition (CVD) furnace for growth of 2D materials (homebuilt)
  • Atomic Force Microscope (JPK Nanowizard)
  • Wire Bonder (TPT HB05)
  • Optical microscopes with transfer stages for 2D materials (Nikon Eclipse LV-100)
  • Plasma etchers
  • Critical point dryer

We cooperate with the Helmholtz-Zentrum Berlin for Focus Ion Beam and Helium Ion processing and with the nanophotonics cleanroom at TU Berlin for additional photolithorgraphy and etching processes.


Happy Evaporator

For electrical, optoelectronic, and mechanical measurements we have the following toys:

  • Cryogenics Ltd.  1.5K, 12 Tesla cryostat
  • Lakeshore low temperature probestation
  • Custom scanning photocurrent setup
  • Custom cryostat with nanomechanical manipulation and optical access
  • Low temperature photoluminescence/Raman setup with gas access