Nanofabrication

To fabricate nanoscale devices, we operate a cleanroom facility at FU Berlin (SupraFab, Altensteinstraße 23a)). It currently includes the following tools:

• Electron beam lithography system (Raith Pioneer 2)
• Focussed ion beam system (FEIScios 2 Dual Beam)
• Metal evaporator (KJLC Nano 36)
• Atomic Force Microscope (JPK Nanowizard)
• Optical microscopes with transfer stages for 2D materials (Nikon Eclipse LV-100)
• Plasma etchers (Diner Pico & Plasmatech MiniFlecto)
• Reactive Ionetching (Oxford RIE 80)
• Plasma enhanced vapor deposition (Oxford PECVD 80)
• GloveBox (Inert) with Transferstage (Graphene Industries), ezAFM (Nanomagnetic Instruments) and Molecular Evaporator (Angstrom Covap)
• Optical Lithographie tools (Heidelberg µMLA)
• Raman Spectrometer (Horiba Xplora)

Additionally we have in our Labs at Arnimallee 14 following devices for nanofabrication

• Wire Bonder (TPT HB05)
• Chemical vapor deposition (CVD) furnace for growth of 2D materials (homebuilt)
• Critical point dryer

Measurements

For electrical, optoelectronic, and mechanical measurements we have the following toys:

• Cryogenics Ltd.  1.5K, 12 Tesla cryostat
• Lakeshore low temperature probestation
• Custom scanning photocurrent setup
• Custom cryostat with nanomechanical manipulation and optical access
• Low temperature photoluminescence/Raman setup with gas access